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Microelectromechanical systems
Microelectromechanical systems is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems and nanotechnology.
More at Wikipedia
Nanoelectromechanical systems
Micro-opto-electromechanical systems
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Microelectronic and microelectromechanical systems
Transducers
Microtechnology
Electrical engineering
Mechanical engineering
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